Polymer surfaces graphitization by low-energy ion irradiation

Graphitized layers as suspended membranes show extraordinary mechanical stability and can be used in various MEMS.

Nearly any organic material can be graphitized by ion irradiation. We investigate the relationship between parameters of low-energy ion irradiation and properties of the graphitized surfaces. Depending on the process parameters, the resulting graphitized layer can have different thickness between one and several tens of nanometers, can behave as an insulator or semimetal, and the type of conductance can be precisely controlled. Further efforts are planned in order to improve the electrical properties of the graphitized films and to obtain control of the orientation of graphitic crystallites and of stress in the films.

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